Magnetron Sputtering

Turbo Pumped Sputter and Carbon Coater – DSCT is configured as a sputter coater and fiber carbon coater with interchangeable heads in one instrument suitable for Scanning Electron Microscope (SEM) sample preparation. A wide range of materials could be deposited by DSCT such as gold (Au), platinum/palladium (Pt / Pd) alloy, silver (Ag), chromium (Cr), tungsten (W), iridium (Ir), and etc. This high vacuum SEM coater offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high-quality characterization such as FE-SEM, EDS/WDS, TEM, and EBSD. The DSCT with a 2” magnetron cathode, 80 W switching DC power supply and high current power supply for carbon evaporation, could be used for research and different thin film applications.